What is the compressed air quality standard for semiconductor manufacturing?

The main international standards for semiconductor air compressor systems include the following:

ISO 8573-1-2010: This is a standard issued by the International Organization for Standardization (ISO), which specifies various levels of air quality, as well as detection methods and limit values.

GB/T 2819-2011: This is a standard issued by the National Standardization Administration of China, which stipulates the quality indicators, detection methods and limit values of compressed air, nitrogen and inert gases.

SEMI S2-0715: This is a standard issued by the American Semiconductor Equipment and Materials International Association (SEMI), which requires semiconductor equipment to meet the requirements of personal safety, environmental protection and equipment performance.

SEMI S6-0715: This is also a standard issued by SEMI, requiring semiconductor equipment to comply with electrical safety, mechanical safety and fire and explosion protection regulations.