2026-04-14Views：
The semiconductor industry has extremely high requirements for compressed air, which is usually classified according to its purity, dryness, oil content and other indicators. The classification of semiconductor compressed air is generally as follows:
| Grade | temperament (non-moisture) content | moisture content | oil content | scope of application |
|---|---|---|---|---|
| changman Level | ≥ 99.995% | ≤5mg/m³ | ≤0.003mg/m³ | it is suitable for the most sensitive aspects of semiconductor production, such as lithography machines, scanning electron microscopes and other high-tech manufacturing equipment. |
| Ultra-clean level | ≥ 99.99% | ≤10mg/m³ | ≤0.01mg/m³ | suitable for various aspects of semiconductor production, such as wet process, wafer cleaning, etc. |
| Net grade | ≥ 99.9% | ≤20mg/m³ | ≤0.1mg/m³ | suitable for most aspects of semiconductor production, such as chemical vapor deposition, dry process, etc. |
| Clean level | ≥ 99.5% | ≤50mg/m³ | ≤0.5mg/m³ | suitable for some semiconductor production links, such as oxidation furnace, annealing furnace, etc. |
| Protection level | ≥ 98% | ≤100mg/m³ | ≤1mg/m³ | suitable for non-critical aspects of semiconductor production, such as test equipment, auxiliary equipment, etc. |
| Industrial Grade | ≥ 95% | ≤500mg/m³ | ≤5mg/m³ | it is suitable for equipment other than semiconductor production, such as ordinary mechanical equipment, factory compressed air, etc. |
| Atmospheric Grade | ≥ 90% | ≤1000mg/m³ | ≤10mg/m³ | suitable for some general strong equipment, such as oil drilling, some fully enclosed thermostat, etc. |
These grades are designed to meet the stringent requirements of different semiconductor production processes on the quality of compressed air. In actual production, the higher the level of compressed air, the higher the production cost. Therefore, under the premise of ensuring the quality of the process, low-grade compressed air should be used as much as possible to reduce production costs. Compressed air grade standard of semiconductor plays a vital role in semiconductor production, which plays an important role in ensuring the stability of production process and improving product quality.
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