What is the purity of compressed air commonly used in the semiconductor industry?

In the field of semiconductor manufacturing, the cleanliness of compressed air directly affects the quality of chip production and equipment stability. The industry usually requires compressed air to meet extremely high purity standards to avoid the interference of small impurities in precision processes.

Granklin water lubricated single screw air compressor outputs air through physical compression. Its core advantage lies in oil-free design-pure water is used to replace traditional lubricating oil, oil residue is eliminated from the source, and the basic requirements of semiconductor technology for "zero oil pollution" are met. However, the original compressed air may still contain naturally condensed moisture and tiny particles in the air, which need to be further purified by post-processing equipment.

Compressed air purity standards commonly used in the semiconductor industry usually include: dew point temperature should be controlled below -40 ℃ (to ensure deep drying), particle content should reach ISO 8573-1 standard level 1 or better (particle concentration of particle size ≤ 0.1μm is extremely low), and oil content should be strictly zero. The oil-free air output from the Granklin air compressor can provide a clean foundation for post-processing equipment. By installing a cold dryer, a suction dryer and a precision filter, residual moisture and particulate matter can be effectively removed to ensure that the final gas consumption meets the stringent requirements of semiconductor technology.

The advantages of this scheme are: the oil-free characteristics of the Granklin air compressor avoid the pollution of oil pollution to the drying equipment and the filtration system, and prolong the service life of the post-processing components; at the same time, the stable compressed air flow and pressure characteristics provide guarantee for the efficient operation of the post-processing equipment, and reduce the risk of unstable purification effect caused by air pressure fluctuation.

It is suggested that semiconductor enterprises comprehensively evaluate the purification scheme according to the gas consumption, continuity requirements and environmental humidity of the specific process: in scenarios with high humidity or extremely high requirements on dryness, priority should be given to the combination of suction dryer and multi-stage filtration; If the environmental humidity is controllable and the process tolerance is high, the matching of cold dryer and precision filter can also be used as an economical choice. The combination of Grantklin air compressor and post-processing equipment can provide the semiconductor industry with reliable gas solutions that meet precision manufacturing standards.