Requirements for compressed air index of microelectronic packaging

Microelectronic packaging has strict requirements on the quality of compressed air, mainly including the following aspects:

particle concentration: Due to the high precision of microelectronic products, tiny particle pollution may lead to product failure. Therefore, the concentration of particulate matter in the compressed air must be very low, usually less than 100 per cubic foot (or less) to ensure the cleanliness of the production environment and the quality of the product.

Humidity control: Humidity also has a great influence on microelectronic products. Excessive humidity may cause problems such as moisture and corrosion. Therefore, the compressed air in the microelectronic package must strictly control the humidity, usually requiring a relative humidity of less than 50% to prevent the product from being affected by moisture.

Pressure and flow: There are also specific requirements for the pressure and flow of compressed air during the microelectronic packaging process. The general pressure requirement is around 0.7MPa, but the specific requirements may vary with different process steps and equipment.

Dew point temperature: The dew point temperature of compressed air is also an important indicator. In microelectronic packaging, the pressure dew point requirements for compressed air may be high, for example, at -70°C or lower, to prevent condensation water from forming during the packaging process and causing product damage.

In order to meet these stringent requirements, the microelectronics industry often chooses to use oil-free screw compressors or other high-efficiency air compression equipment to ensure high-quality, clean and dry compressed air. In addition, it will be equipped with various filters and dryers to further purify the compressed air and meet the high standards of microelectronic packaging.

In general, microelectronic packaging has many strict requirements for compressed air to ensure product quality and reliability. When selecting and using compressed air systems, these requirements must be fully considered and appropriate measures must be taken to meet them.