Technical requirements for operation of air compression system in semiconductor plant

The operating technical requirements of air compression systems in semiconductor factories are extremely strict. These requirements are designed to ensure that the quality of compressed air meets the high standards in the semiconductor production process. The following is a detailed summary of the technical requirements for the operation of the air compression system in the semiconductor plant:

1. compressed air quality standard

1. moisture content:
   • dew point requirements: usually not higher than -40 ℃, to ensure that the compressed air is almost free of moisture, to prevent moisture condensation in the pipeline or equipment, affecting the accuracy and life of the equipment, while avoiding contamination of production materials such as wafers.
2. Oil vapor content:
   • content limit: no more than 0.01 mg/m3, or even completely oil-free. Oil vapor can contaminate the semiconductor surface and affect product quality.
3. solid particle:
   • the compressed air should not contain solid particles, such as dust, metal shavings, etc. These particles will cause scratches or pollution on the wafer surface, which will seriously affect the product quality.

2. System Stability Requirements

1. pressure and flow stability:
   • the pressure and flow of compressed air must be kept stable to ensure the continuity and consistency of the production process. This requires the air compression system to have precise adjustment ability and stable output performance.
2. equipment reliability:
   • key equipment in air compression systems, such as compressors, dryers, filters, etc., require high reliability and long life to reduce downtime and increase productivity.

3. equipment and technology selection

1. oil-free air compressor:
   • semiconductor plants usually use oil-free air compressors to eliminate the possibility of oil pollution from the source. The oil-free air compressor adopts special sealing material and structure to ensure the pure oil-free compressed air.
2. High efficiency precision filter:
   • through multi-layer filtration technology, the tiny particles and grease in the air are effectively filtered to ensure the cleanliness of the compressed air.
3. air dryer:
   • choose high-efficiency air dryers, such as refrigerated dryers or adsorption dryers, to further reduce the moisture content in the air.
4. intelligent control system:
   • using intelligent frequency conversion technology, the output pressure and flow are dynamically adjusted according to actual needs to achieve energy efficiency optimization and stable operation.

4. maintenance and monitoring

1. regular inspection and maintenance:
   • regularly check and maintain the compressor, filter, dryer and gas distribution pipeline to ensure the normal operation of the equipment. This includes operations such as cleaning, replacing the filter element, and checking the tightness.
2. Air quality monitoring:
   • set up air quality monitoring points in the system to monitor the moisture, oil vapor and solid particle content in the compressed air in real time to ensure that the air quality always meets the standard requirements.
3. Tightness and air leakage inspection:
   • pay attention to the airtightness and air leakage problems of the air system, find and deal with air leakage points in time, and avoid energy waste and air quality degradation.

5. compliance with relevant standards and regulations

the operation of air compression systems in semiconductor plants is also subject to relevant industry standards and regulations, such as SEMI S2-0715, SEMI S6-0715, ISO 8573-1-2010 and GB/T 2819-2011. These standards specify the requirements for semiconductor equipment in terms of personal safety, environmental protection, electrical safety, mechanical safety and gas quality, and are an important basis for ensuring the safe, efficient and high-quality operation of the semiconductor production process.

In summary, the technical requirements for the operation of the air compression system in the semiconductor plant involve the quality standards of compressed air, system stability requirements, equipment and technology selection, maintenance and monitoring, and compliance with relevant standards and regulations. The strict implementation of these requirements is of great significance to ensure the smooth progress of the semiconductor production process and high stability of product quality.