What are the requirements of semiconductor components for air compressor quality?

Semiconductor components have very strict requirements on the quality of air compressor, mainly including the following aspects:

1. Particulate matter concentration: The particulate matter in the semiconductor compressed air must be very small, and the particulate matter concentration is usually less than 100 per cubic foot, or even lower, to ensure the cleanliness of the production environment and the quality of the product. In some high-standard application scenarios, the dust requirement may reach 0.01 μm, that is, the solid particle size in the compressed air should be less than this value.

2. Humidity control: In order to prevent the product from being affected by humidity, the humidity in the semiconductor compressed air must be strictly controlled. A relative humidity of less than 50% is usually required to prevent the product from being affected by moisture. In addition, the dew point temperature is also an important indicator to measure the moisture content in compressed air. Generally, the dew point temperature is required to be between -40 ℃ and -70 ℃ to ensure that the air does not contain too much moisture.

3. Oil content: The oil content in the semiconductor compressed air must be very low, usually requiring a total oil content of less than 1ppm, and even 0.00ppm in some cases, which basically requires that the compressed air does not contain oil to avoid Pollution to the production process and products.

4. Microbial control: In order to prevent the growth of microorganisms from affecting the product, the microorganisms in the semiconductor compressed air must be controlled, and the microbial concentration is usually required to be lower than a certain standard.

5. Chemical pollutant control: The chemical pollutants in the semiconductor compressed air must also be strictly controlled to ensure the quality of the product and the stability of the production process. This usually means that the concentration of chemical contaminants should be below a specific safety limit.

to sum up, the requirements of semiconductor components on the quality of air compressor are various, including particle concentration, humidity, oil content, microorganisms and chemical pollutants. These strict quality requirements are to ensure the stability of the semiconductor production process and the quality of the product.