Semiconductor Compressed Air Quality Standard

The semiconductor air compressor system is one of the important equipment used in the semiconductor production and research and development process, which can provide high-quality and stable gas supply for the semiconductor manufacturing process. At present, the main international standards for semiconductor air compressor systems include the following:

1.SEMI S2-0715: This is a standard issued by the American Semiconductor Equipment and Materials International Association (SEMI), which requires semiconductor equipment to meet the requirements of personal safety, environmental protection and equipment performance.

SEMI S6-0715: This is also a standard issued by SEMI, requiring semiconductor equipment to comply with electrical safety, mechanical safety and fire and explosion protection regulations.

3.ISO 857 3-1-2010: This is a standard issued by the International Organization for Standardization (ISO), which specifies various levels of air quality, as well as detection methods and limit values.

4.GB/ T 2819-2011: This is a standard issued by the National Standardization Administration of China, which stipulates the quality indicators, detection methods and limit values of compressed air, nitrogen and inert gases.

The above standards are the basic requirements that semiconductor air compressor systems must comply with, which can help ensure the safety of equipment, stable performance and reliable gas quality in the semiconductor production process.