What is the compressed air quality in semiconductor wafer manufacturing

In the semiconductor wafer manufacturing process, the quality of compressed air is very important, because it directly affects the normal operation of production equipment, product yield and the cleanliness of the production environment. The following are some of the key requirements for compressed air quality in semiconductor wafer manufacturing:

dryness: The compressed air must be very dry to avoid condensation in the air supply system. Moisture can cause corrosion of equipment, degradation of product quality, and problems in the production process.

Cleanliness: compressed air is not allowed to have oil, dust, microorganisms and other pollutants. These impurities may contaminate the wafer, resulting in product defects. Therefore, it is necessary to use high-efficiency filters and oil removal equipment to ensure the cleanliness of the air.

Pressure stability: Wafer fabrication equipment has strict requirements on the pressure stability of compressed air. Pressure fluctuations may affect the normal operation of the equipment and the stability of the process. Therefore, it is necessary to ensure that the pressure of the compressed air supply system is stable, and it is equipped with appropriate pressure adjustment and buffering equipment.

Dew point temperature: Dew point temperature is an important indicator to measure the degree of drying of compressed air. In semiconductor manufacturing, the dew point temperature of the compressed air is usually required to be well below the ambient temperature to prevent condensation water from being generated in the system.

Particulate control: Particulate contamination in compressed air is also an important issue. These particles may come from the compressed air system itself or from the external environment. Therefore, the compressed air needs to be finely filtered to ensure that it meets production requirements.

In order to meet the above requirements, semiconductor wafer manufacturing plants are usually equipped with special compressed air handling systems, including dryers, filters, oil removers and other equipment to ensure that the quality of compressed air meets production standards. At the same time, regular inspection and maintenance is also essential to ensure the continuous and stable operation of the system and the continuous compliance of the compressed air quality.