2026-04-10Views：
In the semiconductor wafer manufacturing process, the quality of compressed air is very important, because it directly affects the normal operation of production equipment, product yield and the cleanliness of the production environment. The following are some of the key requirements for compressed air quality in semiconductor wafer manufacturing:
dryness: The compressed air must be very dry to avoid condensation in the air supply system. Moisture can cause corrosion of equipment, degradation of product quality, and problems in the production process.
Cleanliness: compressed air is not allowed to have oil, dust, microorganisms and other pollutants. These impurities may contaminate the wafer, resulting in product defects. Therefore, it is necessary to use high-efficiency filters and oil removal equipment to ensure the cleanliness of the air.
Pressure stability: Wafer fabrication equipment has strict requirements on the pressure stability of compressed air. Pressure fluctuations may affect the normal operation of the equipment and the stability of the process. Therefore, it is necessary to ensure that the pressure of the compressed air supply system is stable, and it is equipped with appropriate pressure adjustment and buffering equipment.
Dew point temperature: Dew point temperature is an important indicator to measure the degree of drying of compressed air. In semiconductor manufacturing, the dew point temperature of the compressed air is usually required to be well below the ambient temperature to prevent condensation water from being generated in the system.
Particulate control: Particulate contamination in compressed air is also an important issue. These particles may come from the compressed air system itself or from the external environment. Therefore, the compressed air needs to be finely filtered to ensure that it meets production requirements.
In order to meet the above requirements, semiconductor wafer manufacturing plants are usually equipped with special compressed air handling systems, including dryers, filters, oil removers and other equipment to ensure that the quality of compressed air meets production standards. At the same time, regular inspection and maintenance is also essential to ensure the continuous and stable operation of the system and the continuous compliance of the compressed air quality.
In the field of oil-free air compressors, the oil content of the gas is a crucial indicator, which is directly related to the purity of the compressed air and the applicability of the application field. The water-lubricated screw air compressor produced by Shanghai Granklin Group has demonstrated excellent performance in this regard.
The air compressed by the air compressor usually contains moisture, which may cause damage to the equipment using the air. Therefore, gas water removal is a very important part of the air compressor system. The following are some air compressor gas water removal methods: cooling method:
Q: What industry will use the air compressor? A: The role of the air compressor is mainly to provide air power. 1. Drive various pneumatic machinery; 2. Used for remote transportation of gas and natural gas; 3. Spray blasting; 4. Synthetic polymerization
The detection of water content in the air of air compressor should be carried out according to national standards or industry standards. Under normal circumstances, in the standard GB/T3853-2018 "Technical Conditions for Air Compressors", the saturated water content of compressed air is 3 when the relative humidity is 100 at 30 ℃.
In the electronic semiconductor industry, the particulate matter requirements of compressed air are extremely strict, usually requiring that the number of particles greater than or equal to 0.1 microns per cubic meter of air does not exceed 3520 (100-grade clean room standard), and some high-end processes even require ISO 1-grade standards, that is, per cubic meter.
Air compressor safety rules and operating procedures 1. safety rules Before starting the air compressor, a comprehensive inspection must be carried out to ensure that all protective devices and safety accessories are in good condition. In particular, safety valves and pressure gauges need to be inspected regularly, usually
Deoiling and dehumidification of compressed air is the core link to ensure the precision of industrial production and the reliability of equipment operation, which needs to be realized by combining source control and post-processing technology. The following from the specification requirements, technical path and industry application of the three aspects of the system.
There is a certain relationship between the pressure and flow of compressed air, but this relationship is not a simple linear relationship, but is affected by many factors. The following is a detailed explanation of this relationship: 1. basic concepts Pressure: Pressure is applied to an area
The air pressure of an air compressor varies depending on its type, design, and usage scenario. Generally speaking, the air pressure of the air compressor is usually in the range of 6-14bar, and the specific pressure depends on the power and usage of the compressor. This range is
Whether the product equipment is good or not is never blown out by itself. Each user has his own consideration in terms of cost performance. Domestic air compressor need to purchase oil-free air compressor, you can contact us "Shanghai granklin group". Professional production & ldquo
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