What are the compressed air requirements for the semiconductor industry

The semiconductor industry has very strict requirements for compressed air, because compressed air is directly in contact with the product, and its quality and purity directly affect the quality and performance of the product. The following are the main requirements for compressed air in the semiconductor industry:

particle control: Due to the high precision of semiconductor products, tiny particle contamination can lead to product failure. Therefore, the concentration of particulate matter in the compressed air is required to be very low, usually less than 100 per cubic foot (or less) to ensure the cleanliness of the production environment and the quality of the product.

Humidity control: Humidity also has a great influence on semiconductor products. Excessive humidity may cause problems such as moisture and corrosion. Therefore, the humidity in the semiconductor compressed air must be strictly controlled, and the relative humidity is usually required to be lower than 50% to prevent the product from being affected by moisture.

Oil control: The oil in the compressed air will pollute the semiconductor products and affect the quality and performance of the products. Therefore, the oil content in the compressed air is required to be very low, and the total oil content is usually less than 1ppm or even lower. Some high-end applications, such as chip manufacturing, even require the use of 0 oil-free compressed air.

Gas purity: In addition to particulate matter, humidity and oil, the semiconductor industry also requires compressed air to have a certain degree of gas purity. This is mainly to prevent other gas components from polluting the product or affecting the performance of the product. Generally speaking, the purity requirements of nitrogen, oxygen and other gases are relatively high.

In order to meet these requirements, the semiconductor industry usually uses multi-stage filtration, drying and purification processes to ensure that the quality and purity of compressed air meet production requirements. At the same time, the production, transportation and use of compressed air will be strictly monitored and managed to ensure the stability and reliability of compressed air.