Compressed air plant service requirements for semiconductor equipment

Semiconductor equipment compressed air plant requirements are the core elements to ensure chip manufacturing accuracy and product yield, from the gas purity, dryness, stability and system reliability four aspects of the establishment of strict standards:

1. Gas purity control
semiconductor production has zero tolerance for oil pollution, and compressed air must meet the "oil-free and dust-free" standard. Through the water-lubricated single screw compression technology, the traditional lubricating oil is replaced by pure water, and the risk of oil pollution is eliminated from the source. With the multi-stage precision filtration system, particles above 0.01μm can be effectively removed to ensure that the solid impurity content in the gas is less than 0.001 mg/m & sup3;, which fully meets the gas demand of semiconductor clean room.

2. Dryness depth guarantee
the water vapor content of the compressed air shall be controlled to an ultra-low dew point level. Adopting the combination scheme of adsorption drying device and freezing dryer, the dew point of gas pressure can be stably reduced to below -70 ℃, so as to avoid the risk of corrosion or short circuit caused by condensate water on the inner wall of the pipeline to precision equipment. Supporting dew point sensor real-time monitoring to ensure that the dryness continues to meet the standards.

3. Pressure stability requirements
semiconductor equipment is sensitive to the pressure fluctuation of compressed air, and the pressure fluctuation should be controlled within ± 0.01MPa. By configuring the gas storage tank and intelligent pressure regulating valve, the peak fluctuation of gas consumption can be buffered; the frequency conversion control technology is adopted to make the output pressure of the compressor match the terminal demand in real time, so as to avoid the impact of excessive pressure on the equipment.

4. System reliability design

• pipe material selection of 316L stainless steel, and do electrolytic polishing treatment, to avoid metal ion precipitation pollution.
• Key nodes are equipped with redundant backup, such as dual compressors running in parallel, dual power supply, etc., to ensure continuous gas supply.
• Install on-line monitoring system, real-time feedback gas oil content, dew point, pressure and other parameters, abnormal situation automatic alarm and start the standby equipment.

Application Value of Granklin Water Lubricated Single Screw Compressor
relying on the precision meshing technology of single screw and star wheel, combined with the natural cleaning characteristics of water lubricating medium, it provides continuous and stable high-quality compressed air for the semiconductor industry. Its oil-free design eliminates the risk of oil pollution. The intelligent control system can accurately adjust the output pressure. With the deep drying device and high-efficiency filtration system, a complete clean air solution is built to provide reliable gas power guarantee for chip manufacturing.