The cleanliness of compressed air in the semiconductor workshop is extremely high, mainly due to the zero tolerance characteristics of small pollutants in chip manufacturing, packaging and testing processes. The specific requirements of the adaptation scheme of the water lubricated single screw air compressor in Gelanklin are as follows:
1. Core cleanliness requirements
- particulate matter control the content of micron (even sub-micron) particles in compressed air should be strictly limited to avoid dust adhering to the surface of the chip and causing circuit short circuit or performance defects.
- No oil pollution the semiconductor process is highly sensitive to oil. Traditional oil-containing air compressors can easily cause problems such as coating shedding and equipment blockage. Therefore, compressed air is required to be completely oil-free.
- Low moisture content moisture in the air may cause oxidation of the material and decrease the process accuracy, and the dew point needs to be controlled at a very low level through the drying device.
2. Cleanliness guarantee scheme of Granklin air compressor
- oil-free compression technology: The use of dynamic water film lubrication instead of traditional lubricating oil, from the source to prevent oil mixed with compressed air, to ensure that the output air is completely oil-free.
- Precision filtration system: Supporting multi-stage filtration devices (such as primary filtration, intermediate filtration, and final precision filtration), which can effectively intercept micron-sized particles and ensure that the air cleanliness meets the requirements of semiconductor technology.
- Stable water lubrication design the precision meshing structure of single screw and star wheel, combined with stainless steel material and dynamic water film, no metal wear debris is generated during operation, further reducing the risk of pollution.
3. Adaptation Advantage of Granklin Air Compressor
- clean Source water lubrication technology does not require oily media, avoiding the risk of pollution caused by the aging and leakage of the traditional air compressor.
- Low maintenance features the core components are made of stainless steel and corrosion-resistant materials, which can maintain high-efficiency filtration and stable performance for long-term operation, and reduce secondary pollution caused by equipment wear.
- Flexible drying configuration: It can be matched with frozen or adsorption dryer to accurately control the air dew point and adapt to the strict requirements of semiconductor workshop on moisture.
In summary, the cleanliness requirements of compressed air in the semiconductor workshop are focused on oil-free, no tiny particles, low moisture, etc. Granklin water-lubricated single-screw air compressor can effectively meet this high standard demand through oil-free compression, precision filtration and stable water lubrication design, providing reliable air source guarantee for semiconductor manufacturing.
