2026-04-14Views：
In semiconductor manufacturing, the quality standard of compressed air is extremely strict, and it needs to meet the requirements of cleanliness, chemical purity and stability at the same time. The following are the key parameters and the criteria on which they are based:
SEMI F58-0701: specifies the purity of gas and liquid, the total sulfur content is required to be less than or equal to 0.1 ppm, and there is no siloxane pollution.
SEMI C1.3: For wafer transfer systems, compressed air is passed through high efficiency filters (HEPA grade).
| Parameters | semiconductor Industry Standards | detection method |
|---|---|---|
| oil content | ≤0.01 mg/m³(ISO 8573-1 Class 0) | infrared spectroscopy (FTIR) |
| particulate matter | ≤0.1μm(ISO 14644-1 Class 5) | laser particle counter |
| dew point temperature | ≤-40°C (≤-70°C for some processes) | mirror condensation dew point meter |
| total sulfur content | ≤0.1 ppm | flame Photometric Detection (FPD) |
| microbial control | ≤ 1 CFU/m & sup3;(required for some clean rooms) | impact type microorganism sampler |
| chemical residue | no siloxanes, chloride ions, heavy metals | gas chromatography-mass spectrometry (GC-MS) |
when using compressed air, the positive pressure ventilation system shall comply with ISO 14644-1 Class 5 cleanliness.
oil-free air compressor adopt water lubrication or PTFE coating technology to avoid oil pollution.
multistage filtration: Configuration of activated carbon filter (oil vapor), ultra-precision filter (0.01μm grade).
Pipeline treatment: Use electrolytic polished stainless steel pipe (Ra≤ 0.4 μm), welded connection to reduce leakage.
real-time monitoring: Install dew point sensor, oil vapor detector, data can be traced (in accordance with FDA 21 CFR Part 11).
third Party Testing: A compliance report is issued by an authority (e. g. SGS, TÜV).
Periodic verification quarterly detection of oil content, dew point and particulate matter, annual full analysis.
The semiconductor compressed air standard needs to run through the whole process of equipment selection, system design and operation and maintenance, and its strictness is designed to avoid process pollution and ensure good product rate. As the process node advances (e. g., below 3nm), higher requirements may be placed on nanoscale particles and new chemical contaminants in the future.
Comprehensive Plan to Ensure Compressed Air Gas Quality Core Indicators of 1. Gas Quality Compressed air quality needs to focus on the following four major indicators: Oil content: Oil may pollute products or block equipment (such as spinning components in the chemical fiber industry). Moisture content: Moisture can cause piping
Technical Solution to the Problem of Water Content in the Air Compressor During the operation of the air compressor, the temperature rises due to the compression of the air, and the water vapor in the air condenses into liquid water. If this moisture is not effectively treated, it will have a significant impact on the operation of the system and the subsequent use of gas.
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The hospital air compressor has a wide range of uses, mainly including the following aspects: 1. Medical gas supply Many equipment in the hospital, such as operating room equipment, dental chairs, ventilators, etc., require stable compressed air as a power source. By compressing and purifying the air, the air compressor will
Open the drain valve of the air compressor, you can follow the following steps: Turn off the power 1. preparations: Before performing any maintenance operations, first make sure that the air compressor has been turned off and the power supply is cut off to prevent accidental startup and the risk of electric shock. Prepare the tool:
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