2026-04-14Views：
In semiconductor manufacturing, the quality standard of compressed air is extremely strict, and it needs to meet the requirements of cleanliness, chemical purity and stability at the same time. The following are the key parameters and the criteria on which they are based:
SEMI F58-0701: specifies the purity of gas and liquid, the total sulfur content is required to be less than or equal to 0.1 ppm, and there is no siloxane pollution.
SEMI C1.3: For wafer transfer systems, compressed air is passed through high efficiency filters (HEPA grade).
| Parameters | semiconductor Industry Standards | detection method |
|---|---|---|
| oil content | ≤0.01 mg/m³(ISO 8573-1 Class 0) | infrared spectroscopy (FTIR) |
| particulate matter | ≤0.1μm(ISO 14644-1 Class 5) | laser particle counter |
| dew point temperature | ≤-40°C (≤-70°C for some processes) | mirror condensation dew point meter |
| total sulfur content | ≤0.1 ppm | flame Photometric Detection (FPD) |
| microbial control | ≤ 1 CFU/m & sup3;(required for some clean rooms) | impact type microorganism sampler |
| chemical residue | no siloxanes, chloride ions, heavy metals | gas chromatography-mass spectrometry (GC-MS) |
when using compressed air, the positive pressure ventilation system shall comply with ISO 14644-1 Class 5 cleanliness.
oil-free air compressor adopt water lubrication or PTFE coating technology to avoid oil pollution.
multistage filtration: Configuration of activated carbon filter (oil vapor), ultra-precision filter (0.01μm grade).
Pipeline treatment: Use electrolytic polished stainless steel pipe (Ra≤ 0.4 μm), welded connection to reduce leakage.
real-time monitoring: Install dew point sensor, oil vapor detector, data can be traced (in accordance with FDA 21 CFR Part 11).
third Party Testing: A compliance report is issued by an authority (e. g. SGS, TÜV).
Periodic verification quarterly detection of oil content, dew point and particulate matter, annual full analysis.
The semiconductor compressed air standard needs to run through the whole process of equipment selection, system design and operation and maintenance, and its strictness is designed to avoid process pollution and ensure good product rate. As the process node advances (e. g., below 3nm), higher requirements may be placed on nanoscale particles and new chemical contaminants in the future.
Oil-free air compressor, the name sounds very interesting! The answer to the question of whether it needs refueling is actually hidden in its name. The word "oil-free" is key. This means that this air compressor in the design and operation,
The air supply of an air compressor is determined according to its model, power and design parameters, so the air supply will vary with different air compressors. In order to obtain accurate air supply data, you can refer to the technical specification sheet or user manual of the air compressor.
The moisture in the air inside the air compressor is usually generated by high ambient humidity or condensation when compressed air is cooled. In order to remove the moisture in the air inside the air compressor, the following measures can be taken: Use a dryer: Install a dryer in the compressed air of the air compressor
In the oil drilling and production industry, air compressor is the key power equipment, and its application runs through drilling, oil production, oil and gas separation, pipeline transportation, storage and transportation and other links.
The variable frequency air compressor realizes efficient gas consumption through intelligent adjustment technology. Its core principle is to dynamically adjust the operating state according to the actual gas demand to avoid energy waste and ensure the stability of the system. Traditional air compressors usually run at a fixed speed.
No matter what kind of equipment of the air compressor, it is inevitable that there will be failures in the operation process, and so will the variable frequency air compressor. The following is a summary of some failures and solutions that often occur in the factory during the operation of the variable frequency air compressor. 1. Unstable voltage
The oil-free air compressor still needs to detect the oil content, but the water-lubricated air compressor can significantly reduce the risk of oil pollution due to its unique design, and the detection focus needs to be adjusted in combination with its oil-free characteristics. The following is the specific analysis: Why does the 1. oil-free air compressor still need to detect the oil content? Theoretical oil-free & ne; Real
Medical air compressor is the main component of medical air system. It is an air compressor that converts the power in compressed air into potential energy. It is usually used in medical facilities and medical air equipment. Medical air compressor is mainly used in the operating room,
Many people see this problem will think, oil-free air compressor is certainly not oil, oil compressor is oil. But in fact, this statement is not rigorous, today in detail for you to introduce a
Oil-free air compressor and micro-oil air compressor are suitable for different process scenarios with different requirements for air cleanliness due to the difference in compressed air quality, as follows: oil-free air compressor is suitable for process food and beverage industry: application scenario: pneumatic conveying (such as flour and milk powder conveying),
2018 Granklin Group. All rights reserved 沪ICP备18000439号-2
