Semiconductor factory compressed air supply

In a semiconductor factory, the supply of compressed air is a crucial link, which is directly related to the smooth progress of the production process, the improvement of product quality and the improvement of production efficiency. The following is a detailed explanation of the supply of compressed air to the semiconductor plant:

the Role of 1. Compressed Air in Semiconductor Factory

1. power source:

   • compressed air provides power for various pneumatic equipment in semiconductor factories, such as pneumatic motors, cylinders, etc., to drive silicon wafer cutting, grinding, polishing and other processes.

2. Cleaning and purging:

   • in the semiconductor production process, compressed air is used to purge particles and dust on the surface and inside of the equipment to ensure the cleanliness of the production environment.
   • Compressed air is also used to dry and clean the wafer during wafer processing.

3. Control System:

   • by adjusting the pressure and flow of compressed air, the parameters of semiconductor production equipment can be accurately controlled to improve production efficiency and product quality.

2. Semiconductor Factory Compressed Air Supply System

1. main components:

   • air Compressor: Responsible for compressing the air in the atmosphere to a high pressure state and providing a stable compressed air source for the system. Semiconductor plants usually use lubricant-free air compressors to avoid oil pollution to products.
   • Gas tank: Used to store compressed air to ensure continuous supply during peak demand.
   • Filtration device: Including air filters and process filters, etc., used to remove impurities, particles, moisture and oil in the air, to ensure that the compressed air entering the production process is pure and pollution-free.
   • pipeline network: Transport compressed air from the compressor to all production links to ensure a stable supply and efficient use of compressed air.
   • Control valve: It can accurately control the flow and pressure of compressed air to meet the needs of different production links.

2. Compressed air quality requirements:

   • semiconductor plants have extremely high quality requirements for compressed air, which must meet the standards of oil-free, water-free, and particulate matter-free.
   • According to the international standard ISO 8573-1:2010, the quality of compressed air is classified according to the content of three pollutants: moisture, oil and particulate matter. For semiconductor factories, it is generally required that all contaminants must be Class 0.

3. Energy Efficiency and Cost Control:

   • considering the energy consumption of semiconductor plants, the energy efficiency of compressed air supply systems is essential to control operating costs.
   • Through the use of advanced compressed air technology and equipment, such as frequency conversion air compressor, high-efficiency filtration device, etc., energy efficiency can be improved and production costs can be reduced.

Maintenance and Management of Compressed Air Supply in 3. Semiconductor Factory

1. regular maintenance:

   • the semiconductor factory needs to regularly maintain and maintain the compressed air supply system, including checking the tightness of the pipeline, cleaning the filter device, and calibrating the control valve.

2. Quality monitoring:

   • the quality of the gas is continuously monitored by the CQC to ensure the purity and stability of the compressed air.

3. Emergency plan:

   • semiconductor factories should establish a comprehensive emergency plan to deal with possible system failures or emergencies to ensure the smooth production process.

Case Analysis of Compressed Air Supply in 4. Semiconductor Factory

take a semiconductor factory as an example, the factory uses an advanced compressed air supply system, including multiple oil-free screw compressors, adsorption dryers, high-efficiency filtration devices, and intelligent control systems. The system can ensure the purity and stability of compressed air and meet the high standards of semiconductor production. At the same time, by adopting variable frequency air compressor and optimizing pipeline design, the system also achieves significant energy saving effect and reduces production cost.

Generally speaking, the supply of compressed air in a semiconductor factory is a complex and important link. Through reasonable design, efficient operation and careful maintenance and management, we can ensure the smooth progress of semiconductor production and the improvement of product quality.