2026-04-13Views：
Semiconductor equipment requires extremely high quality of compressed air to ensure the cleanliness of the production environment, the stable operation of the equipment, and the quality and yield of the final product. Specifically, semiconductor equipment has strict requirements on the dust content, residual oil content and dew point temperature of compressed air.
semiconductor equipment requires that the particulate matter content in the compressed air must be very small to ensure the cleanliness of the production environment and avoid product pollution. Typically, the particulate concentration is required to be less than 100 pb/ft3 or even lower. In high-end applications, such as chip manufacturing, the control of dust particles is more stringent, requiring that the size of dust particles should be less than or equal to 0.1 μm to ensure that the air does not contain large particles of dust.
the oil in the compressed air will pollute the semiconductor equipment and affect the quality and performance of the product. Therefore, semiconductor equipment has very strict requirements on the oil content in the compressed air. Generally speaking, the total oil content is required to be less than 1ppm (one part per million), and even in some high-end applications, it is required to use 0-grade oil-free compressed air to completely eliminate the risk of oil pollution. Low oil content can ensure the quality of the product and the smooth progress of the production process.
dew point temperature is an important index to measure the moisture content in compressed air. Semiconductor equipment requires that the dew point temperature of compressed air must be much lower than the ambient temperature to prevent the generation of condensed water in the air supply system, thereby affecting the stable operation of the equipment and the quality and stability of the product. Generally, high-end applications such as chip manufacturing require dew point temperatures below -70°C, and even lower requirements, such as -80°C, -110°C or even -120°C. The strict control of the dew point temperature helps to maintain the stability and reliability of the product.
in summary, semiconductor equipment has strict requirements on the dust content, residual oil content and dew point temperature of compressed air. These requirements are directly related to the cleanliness of the production environment, the stable operation of the equipment, and the quality and yield of the final product. In order to ensure that the quality of compressed air meets the standards, semiconductor equipment manufacturers usually carry out strict inspection and maintenance of compressed air, and adopt efficient air purification equipment and filtration systems to ensure that the quality of compressed air continues to meet production requirements.
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