What is the compressed air system of the semiconductor factory used

The compressed air system in the semiconductor plant is mainly used for several key process steps to ensure the production efficiency and quality of semiconductor products. Specifically, the role of the compressed air system includes the following aspects:

etching process aids: In semiconductor manufacturing, the etching process is a key step in the use of gas chemistry for material removal. The compressed air system can provide a stable auxiliary gas environment to help the substance in the etching process to diffuse efficiently, thereby improving the etching efficiency. This is because the compressed air can maintain a dry and clean gas atmosphere, which is conducive to the etching reaction.

Spray process support: in the semiconductor production process, such as etching, it is necessary to spray reaction gas and polishing liquid into the reaction chamber. These liquids need to be sprayed by compressed air to ensure uniform and efficient liquid delivery. The cleanliness and stability of compressed air are very important for the spray effect, which directly affects the production quality of the product.

Gas delivery: In semiconductor production, it is often necessary to deliver various gases, such as inert gases in the granulation process, oxygen on the wafer surface, etc. The compressed air system can provide a high-pressure conveying carrier, so that the gas can quickly and accurately move to the surface of the product, thereby ensuring the efficiency and stability of production.

Supply process requirements: In some process steps, such as photolithography, it is necessary to uniformly spray photoresist on the surface of the chip. The compressed air system can provide stable and high-pressure gas for the lithography nozzle to ensure that the photoresist is evenly deposited on the surface of the chip to meet the process requirements.

Clean room environment maintenance: semiconductor production requires extremely high cleanliness, and a tiny grain of dust may cause the failure of the entire circuit. Compressed air systems are usually combined with clean room environment maintenance to maintain the cleanliness of the clean room by providing high-quality compressed air to reduce dust and pollutants in the air.

Energy saving and environmental protection: With the advancement of technology, the compressed air system in the semiconductor plant also pays attention to energy saving and environmental protection. For example, the air compressor using frequency conversion technology can adjust the motor speed according to the actual gas demand, reducing energy consumption. At the same time, the heat generated in the compression process is recovered through the waste heat recovery system, which is used to produce hot water or hot air, etc., to achieve zero exhaust of waste heat.

In summary, the compressed air system in the semiconductor plant plays an important role in etching, spraying, gas delivery, supply process requirements and clean room environment maintenance. At the same time, with the continuous development of technology, the compressed air system also pays more and more attention to the improvement of energy saving and environmental protection performance.