Compressed air requirements for chip processing

Chip processing has extremely strict requirements for compressed air, which are mainly reflected in the following aspects:

dryness:

the compressed air must be very dry to avoid condensation in the air supply system. Moisture can cause corrosion of equipment, degradation of product quality, and problems in the production process. Therefore, ensuring the dryness of compressed air is very important for chip processing.

Cleanliness:

oil, dust, microorganisms and other contaminants are not allowed in the compressed air. These impurities may contaminate the wafer, resulting in product defects. The air cleanliness in the chip processing workshop usually meets certain standards, such as 100000 or higher. For critical areas where chips are produced, such as clean rooms, the standard for air cleanliness may be as high as 100, that is, no more than 100 particles above 0.5 microns per cubic meter of air.

In order to achieve such cleanliness requirements, it is necessary to use high-efficiency filters and oil removal equipment to ensure that the air is clean. At the same time, the clean room also needs to be cleaned and disinfected regularly, and maintained and monitored by professionals.

Pressure stability:

wafer fabrication equipment has strict requirements on the pressure stability of compressed air. Pressure fluctuations may affect the normal operation of the equipment and the stability of the process. Therefore, it is necessary to ensure that the pressure of the compressed air supply system is stable, and it is equipped with appropriate pressure adjustment and buffering equipment.

In summary, the requirements of compressed air for chip processing are mainly reflected in three aspects: dryness, cleanliness and pressure stability. In order to meet these requirements, it is necessary to take corresponding technical measures and equipment configuration to ensure that the air quality in the chip processing process reaches the standard, so as to ensure the quality and yield of the product.