Semiconductor Compressed Air Quality Standard

Semiconductor compressed air quality standards mainly include the following aspects:

1. Compressed air quality level: According to ISO 8573.1, the pollutants in compressed air are divided into solid impurities, water and oil. The semiconductor industry usually requires a high air quality level to ensure the stability of the production process and the quality of the products. In particular, the dust requirement is usually up to 0.01 μm, which means that the solid particle size in the compressed air should be smaller than this value.

2. Oil requirements: In the semiconductor industry, the oil content in compressed air is strictly controlled. Generally, the oil requirement is 0.00ppm, that is, the compressed air is basically free of oil to avoid contamination of the production process and products.

3. Dew point: Dew point temperature is an important indicator to measure the moisture content in compressed air. The semiconductor industry usually has very low dew point requirements for compressed air to ensure that the air does not contain too much moisture. Generally, the dew point requirement is between -40°C and -70°C, which helps prevent moisture from interfering with the production process.

4. Pressure requirements: The semiconductor industry also has certain requirements for the pressure of compressed air. Although the specific pressure value may vary with different processes and equipment, in general, the pressure should be kept within a stable range to ensure the smooth progress of the production process.

to sum up, the quality standard of semiconductor compressed air is a comprehensive consideration, including solid impurities, moisture, oil and pressure. These standards are designed to ensure the stability of the semiconductor production process and the quality of the products.