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Semiconductor Process Gas Purity Standard

2026-04-13Views:

In the field of semiconductor manufacturing, the purity standard of process gas is extremely strict, which is directly related to the yield and reliability of the product. The water-lubricated screw air compressor produced by Shanghai Granklin Group plays a key role in ensuring the high purity of semiconductor process gas with its excellent performance and pure compressed air output.

Semiconductor processes require extremely high gas purity, usually more than 99.9999 percent, and even higher in some advanced processes. The water-lubricated screw air compressor of Shanghai Granklin Group, through its unique water lubrication technology, avoids the pollution problem caused by the use of lubricating oil in the traditional air compressor and ensures the purity of the compressed air. This oil-free, pure compressed air is the key to maintaining high gas purity in semiconductor processes.

In addition, the water-lubricated screw air compressor also has the characteristics of high efficiency, stability and energy saving, and can continuously and stably provide high-quality compressed air that meets the requirements of semiconductor technology. In the semiconductor production process, whether it is lithography, etching or other core process links, a stable and pure gas source is needed to ensure the stability of the process and the yield of the product.

To sum up, the water-lubricated screw air compressor produced by Shanghai Granklin Group plays an important role in the guarantee of semiconductor process gas purity by virtue of its excellent performance and pure compressed air output. It not only meets the strict requirements of the semiconductor industry for high purity of gas, but also provides a strong guarantee for the manufacturing quality and reliability of semiconductor products.

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